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InLineNano

In-Line Areal Surface Measurement for Micro and Nano Production

Total Cost €

EC-Contrib. €

Partnership

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Outcomes and
results

InLineNano project word cloud

Explore the words cloud of the InLineNano project. It provides you a very rough idea of what is the project "InLineNano" about.

affordable tool isolation measured vibration combined market line innovation commercial nanoscale stepped preparation structured delivers metrology micro techniques fast optical accuracy validate throughput flexibility precision areal surface industrial interferometry surfaces

Project "InLineNano" data sheet

The following table provides information about the project.

Coordinator	IBS PRECISION ENGINEERING BV Organization address address: Esp 201 city: EINDHOVEN postcode: 5633AD website: www.ibspe.com contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.
Coordinator Country	Netherlands [NL]
Project website	http://www.ibspe.com/page/wavelength-scanning-interferometer.htm
Total cost	71˙429 €
EC max contribution	50˙000 € (70%)
Programme	1. H2020-EU.2.3.1. (Mainstreaming SME support, especially through a dedicated instrument) 2. H2020-EU.2.1.2. (INDUSTRIAL LEADERSHIP - Leadership in enabling and industrial technologies – Nanotechnologies)
Code Call	H2020-SMEINST-1-2014
Funding Scheme	SME-1
Starting year	2015
Duration (year-month-day)	from 2015-05-01 to 2015-10-31

Partnership

Take a look of project's partnership.

#	participants	country	role	EC contrib. [€]
1	IBS PRECISION ENGINEERING BV IBS PRECISION ENGINEERING BV Organization address address: Esp 201 city: EINDHOVEN postcode: 5633AD website: www.ibspe.com contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	NL (EINDHOVEN)	coordinator	50˙000.00

Map

Project objective

A new optical interferometry technology has been developed which delivers fast and high precision areal surface measurements for stepped and structured micro-nanoscale surfaces which cannot be measured by traditional techniques. The technology addresses the market need for high throughput, simple sample preparation and nanoscale accuracy combined with an affordable system cost. Furthermore, a unique vibration isolation innovation means that it has the flexibility to be applied both in-line and in-process. This project aims to validate its commercial potential as both a research and industrial metrology tool.

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The information about "INLINENANO" are provided by the European Opendata Portal: CORDIS opendata.

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