MAGIC SIGNED
Metal Assisted chemical etching of Gratings for X-ray InterferometriC systems
Total Cost €
0EC-Contrib. €
0Partnership
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0MAGIC project word cloud
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Project "MAGIC" data sheet
The following table provides information about the project.
| Coordinator |
EIDGENOESSISCHE TECHNISCHE HOCHSCHULE ZUERICH
Organization address contact info |
| Coordinator Country | Switzerland [CH] |
| Total cost | 149˙997 € |
| EC max contribution | 149˙997 € (100%) |
| Programme |
1. H2020-EU.1.1. (EXCELLENT SCIENCE - European Research Council (ERC)) |
| Code Call | ERC-2016-PoC |
| Funding Scheme | ERC-POC |
| Starting year | 2016 |
| Duration (year-month-day) | from 2016-11-01 to 2018-04-30 |
Partnership
Take a look of project's partnership.
| # | ||||
|---|---|---|---|---|
| 1 | EIDGENOESSISCHE TECHNISCHE HOCHSCHULE ZUERICH | CH (ZUERICH) | coordinator | 136˙197.00 |
| 2 | PAUL SCHERRER INSTITUT | CH (VILLIGEN PSI) | participant | 13˙800.00 |
Map
Project objective
Phase contrast and scattering-based (dark-field) X-ray imaging can potentially revolutionize the radiological approach to medical imaging because they are intrinsically capable of detecting subtle differences in the electron density of a material and of measuring the effective integrated local small-angle scattering power generated by the microscopic density fluctuations in the specimen. Within the context of the ERC-Starting Grant PhaseX (310005) we deeply investigated and further developed gratings- based interferometry, a rapidly establishing phase sensitive technique. In particular, we generated seminal work towards the translation of phase contrast imaging into clinic with the world-wide first in-vitro phase-contrast mammographic investigation of whole breast mastectomies and the first reader study investigating potential clinical relevance of phase-contrast mammography. Grating fabrication is the main bottleneck so far preventing grating-based X-ray phase-contrast interferometry from being applied at high energies and large Field of View (FOV). With PhaseX, we addressed the fundamentals of grating fabrication in order to deliver high-quality diffraction gratings with high-aspect ratio. In particular, we explored unconventional fabrication techniques in order to go beyond the physical limits of the conventional approaches and we developed the idea of innovative technology at the basis of this ERC-PoC project (MAGIC). Among the tested wet etching techniques, Metal Assisted Chemical Etching (MACE) showed exceptional performances for fabrication of large area silicon gratings with high aspect ratio. The main idea of MAGIC is to use MACE for grating fabrication with characteristics that fulfil high energy and large FOV applications: we target the same quality with a competitive price in order to keep the ratio quality/cost in a favorable range with additional advantages of large FOV and possibility of serving a large market on a quicker way.
Publications
| year | authors and title | journal | last update |
|---|---|---|---|
| 2017 |
L. Romano, J. Vila-Comamala, M. Kagias, K. Vogelsang, H. Schift, M. Stampanoni, K. Jefimovs High aspect ratio metal microcasting by hot embossing for X-ray optics fabrication published pages: 6-10, ISSN: 0167-9317, DOI: 10.1016/j.mee.2016.12.032 |
Microelectronic Engineering 176 | 2019-06-12 |
| 2017 |
L. Romano, J. Vila-Comamala, K. Jefimovs, M. Stampanoni Effect of isopropanol on gold assisted chemical etching of silicon microstructures published pages: 59-65, ISSN: 0167-9317, DOI: 10.1016/j.mee.2017.02.008 |
Microelectronic Engineering 177 | 2019-06-12 |
| 2017 |
Konstantins Jefimovs, Lucia Romano, Joan Vila-Comamala, Matias Kagias, Zhentian Wang, Li Wang, Christian Dais, Harun Solak, Marco Stampanoni High-aspect ratio silicon structures by displacement Talbot lithography and Bosch etching published pages: 101460L, ISSN: , DOI: 10.1117/12.2258007 |
Advances in Patterning Materials and Processes XXXIV | 2019-06-12 |
| 2018 |
Joan Vila-Comamala, Lucia Romano, Vitaliy Guzenko, Matias Kagias, Marco Stampanoni, Konstantins Jefimovs Towards sub-micrometer high aspect ratio X-ray gratings by atomic layer deposition of iridium published pages: 19-24, ISSN: 0167-9317, DOI: 10.1016/j.mee.2018.01.027 |
Microelectronic Engineering 192 | 2019-06-12 |
| 2017 |
Lucia Romano, Joan Vila-Comamala, Helmut Schift, Marco Stampanoni, Konstantins Jefimovs Hot embossing of Au- and Pb-based alloys for x-ray grating fabrication published pages: 06G302, ISSN: 2166-2754, DOI: 10.1116/1.4991807 |
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 35/6 | 2019-06-12 |
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