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VAPORE SIGNED

Vapor deposition of crystalline porous solids

Total Cost €

EC-Contrib. €

Partnership

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Outcomes and
results

VAPORE project word cloud

Explore the words cloud of the VAPORE project. It provides you a very rough idea of what is the project "VAPORE" about.

network summary worlds marks previously mofs possibility films nanopores integrate nanoscale scalable tool free film first time candidates proof nano sensors fertilization expansion assembly device route create scope fabricate cvd milestone chemistry solid pores mof platform microelectronics self environment organic frameworks implements inside materials vapor contamination microporous integration crystalline tuning cross nanometer deposition pillars vapore chemical corrosion illustrated porous electrolytes fabrication molecular sensor solids regular metal start incompatible solvent fine coatings

Project "VAPORE" data sheet

The following table provides information about the project.

Coordinator	KATHOLIEKE UNIVERSITEIT LEUVEN Organization address address: OUDE MARKT 13 city: LEUVEN postcode: 3000 website: www.kuleuven.be contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.
Coordinator Country	Belgium [BE]
Project website	https://www.kuleuven.be/english/research/EU/p/horizon2020/es/erc/VAPORE
Total cost	1˙787˙475 €
EC max contribution	1˙787˙475 € (100%)
Programme	1. H2020-EU.1.1. (EXCELLENT SCIENCE - European Research Council (ERC))
Code Call	ERC-2016-STG
Funding Scheme	ERC-STG
Starting year	2016
Duration (year-month-day)	from 2016-12-01 to 2021-11-30

Partnership

Take a look of project's partnership.

#	participants	country	role	EC contrib. [€]
1	KATHOLIEKE UNIVERSITEIT LEUVEN KATHOLIEKE UNIVERSITEIT LEUVEN Organization address address: OUDE MARKT 13 city: LEUVEN postcode: 3000 website: www.kuleuven.be contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	BE (LEUVEN)	coordinator	1˙787˙475.00

Map

Project objective

Metal-organic frameworks (MOFs) are crystalline solids with highly regular pores in the nanometer range. The possibility to create a tailored nano-environment inside the MOF pores makes these materials high-potential candidates for integration with microelectronics, e.g. as sensor coatings, solid electrolytes, etc. However, current solvent-based methods for MOF film deposition, a key enabling step in device integration, are incompatible with microelectronics fabrication because of contamination and corrosion issues.

VAPORE will open up the path to integrate MOFs in microelectronics by developing a solvent-free chemical vapor deposition (CVD) route for MOF films. MOF-CVD will be the first example of vapor-phase deposition of any type of microporous crystalline network solid and marks an important milestone in processing such materials. Development of the MOF-CVD technology platform will start from a proof-of-concept case and will be supported by the following pillars: (1) Insight in the process, (2) expansion of the materials scope and (3) fine-tuning process control. The potential of MOF-CVD coatings will be illustrated in proof-of-concept sensors.

In summary, by growing porous crystalline films from the vapor phase for the first time, VAPORE implements molecular self-assembly as a scalable tool to fabricate highly controlled nanopores. In doing so, the project will enable cross-fertilization between the worlds of nanoscale chemistry and microelectronics, two previously incompatible fields.

Publications

List of publications.
year	authors and title	journal	last update
2020	TimothÃ©e Stassin, Ivo Stassen, Nathalie Wauteraerts, Alexander John Cruz, Marianne KrÃ¤uter, Anna Maria Coclite, Dirk De Vos, Rob Ameloot Solvent-Free Powder Synthesis and Thin Film Chemical Vapor Deposition of a Zinc Bipyridyl-Triazolate Framework published pages: 71-74, ISSN: 1434-1948, DOI: 10.1002/ejic.201901051	European Journal of Inorganic Chemistry 2020/1	2020-02-20
2019	Mikhail Krishtab, Ivo Stassen, TimothÃ©e Stassin, Alexander John Cruz, Oguzhan Orkut Okudur, Silvia Armini, Chris Wilson, Stefan De Gendt, Rob Ameloot Vapor-deposited zeolitic imidazolate frameworks as gap-filling ultra-low-k dielectrics published pages: , ISSN: 2041-1723, DOI: 10.1038/s41467-019-11703-x	Nature Communications 10/1	2020-02-20
2019	JoÃ£o Marreiros, Lenz Van Dommelen, Guillaume Fleury, Rodrigo de Oliveira-Silva, TimothÃ©e Stassin, Paul Iacomi, Shuhei Furukawa, Dimitrios Sakellariou, Philip L. Llewellyn, Maarten Roeffaers, Rob Ameloot Vapor-Phase Linker Exchange of the Metal-Organic Framework ZIF-8: A Solvent-Free Approach to Post-synthetic Modification published pages: 18471-18475, ISSN: 1433-7851, DOI: 10.1002/anie.201912088	Angewandte Chemie International Edition 58/51	2020-02-20
2019	Alexander John Cruz, Ivo Stassen, Mikhail Krishtab, Kristof Marcoen, TimothÃ©e Stassin, Sabina RodrÃguez-Hermida, Joan Teyssandier, Sven Pletincx, Rhea Verbeke, VÃctor Rubio-GimÃ©nez, Sergio Tatay, Carlos MartÃ-Gastaldo, Johan Meersschaut, Philippe M. Vereecken, Steven De Feyter, Tom Hauffman, Rob Ameloot Integrated Cleanroom Process for the Vapor-Phase Deposition of Large-Area Zeolitic Imidazolate Framework Thin Films published pages: 9462-9471, ISSN: 0897-4756, DOI: 10.1021/acs.chemmater.9b03435	Chemistry of Materials 31/22	2020-02-20
2020	TimothÃ©e Stassin, Ivo Stassen, JoÃ£o Marreiros, Alexander John Cruz, Rhea Verbeke, Min Tu, Helge Reinsch, Marcel Dickmann, Werner Egger, Ivo F. J. Vankelecom, Dirk E. De Vos, Rob Ameloot Solvent-free powder synthesis and MOF-CVD thin films of the large-pore metal-organic framework MAF-6 published pages: tbd, ISSN: 0897-4756, DOI: 10.1021/acs.chemmater.9b03807	Chemistry of Materials tbd	2020-02-20
2019	Min Tu, Helge Reinsch, Sabina RodrÃguez-Hermida, Rhea Verbeke, TimothÃ©e Stassin, Werner Egger, Marcel Dickmann, Bjorn Dieu, Johan Hofkens, Ivo F. J. Vankelecom, Norbert Stock, Rob Ameloot Reversible Optical Writing and Data Storage in an Anthracene-Loaded Metal-Organic Framework published pages: 2423-2427, ISSN: 1433-7851, DOI: 10.1002/anie.201813996	Angewandte Chemie International Edition 58/8	2019-08-29
2019	Joao Marreiros, Chiara Caratelli, Julianna Hajek, AndraÅ¾ Krajnc, Guillaume Fleury, Bart Bueken, Dirk E. De Vos, Gregor Mali, Maarten B. J. Roeffaers, Veronique Van Speybroeck, Rob Ameloot Active Role of Methanol in Post-Synthetic Linker Exchange in the Metalâ€“Organic Framework UiO-66 published pages: 1359-1369, ISSN: 0897-4756, DOI: 10.1021/acs.chemmater.8b04734	Chemistry of Materials 31/4	2019-08-29
2019	TimothÃ©e Stassin, Sabina RodrÃguez-Hemida, Benedikt Schrode, Alexander John Cruz, Francesco Carraro, Dmitry Kravchenko, Vincent Creemers, Ivo Stassen, Tom Hauffman, Dirk E. De Vos, Paolo Falcaro, Roland Resel, Rob Ameloot Vapour-phase deposition of oriented copper dicarboxylate metal-organic framework thin films published pages: , ISSN: 1359-7345, DOI: 10.1039/c9cc05161a	Chemical Communications	2019-08-29
2017	Ivo Stassen, Nicholas Burtch, Alec Talin, Paolo Falcaro, Mark Allendorf, Rob Ameloot An updated roadmap for the integration of metalâ€“organic frameworks with electronic devices and chemical sensors published pages: 3185-3241, ISSN: 0306-0012, DOI: 10.1039/C7CS00122C	Chemical Society Reviews 46/11	2019-06-13

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The information about "VAPORE" are provided by the European Opendata Portal: CORDIS opendata.