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SALADIN SIGNED

Superb Atomic LAyer Deposition tool for the semiconductor INdustry

Total Cost €

EC-Contrib. €

Partnership

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Outcomes and
results

SALADIN project word cloud

Explore the words cloud of the SALADIN project. It provides you a very rough idea of what is the project "SALADIN" about.

electro coating wafer 12 sizes p300f fulfil multiple mainstream flexibility silex companies respectively mechanical atomic mems materials market quality films easily productivity tool sensors chemical chemicals applicability precursors supply industry validation single made optimized final semiconductors silicon industrial leds semiconductor saladin coatings property thin compound prove meeting micro first foundry performed responsible ald deposition layer accessible pegasus environment affordable microsystems picosun film

Project "SALADIN" data sheet

The following table provides information about the project.

Coordinator	PICOSUN OY Organization address address: TIETOTIE 3 city: ESPOO postcode: 2150 website: www.picosun.com contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.
Coordinator Country	Finland [FI]
Project website	http://www.saladinprojekti.fi
Total cost	2˙774˙375 €
EC max contribution	1˙935˙937 € (70%)
Programme	1. H2020-EU.2.1.1. (INDUSTRIAL LEADERSHIP - Leadership in enabling and industrial technologies - Information and Communication Technologies (ICT))
Code Call	H2020-ICT-2017-1
Funding Scheme	IA
Starting year	2017
Duration (year-month-day)	from 2017-11-01 to 2021-04-30

Partnership

Take a look of project's partnership.

#	participants	country	role	EC contrib. [€]
1	PICOSUN OY PICOSUN OY Organization address address: TIETOTIE 3 city: ESPOO postcode: 2150 website: www.picosun.com contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	FI (ESPOO)	coordinator	929˙250.00
2	SILEX MICROSYSTEMS AB SILEX MICROSYSTEMS AB Organization address address: BRUTTOVAGEN 1 city: JARVALLA postcode: 175 26 website: www.silexmicrosystems.com contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	SE (JARVALLA)	participant	697˙375.00
3	PEGASUS CHEMICALS LIMITED PEGASUS CHEMICALS LIMITED Organization address address: J. Reid Trading Estate, Factory Road city: Sandycroft postcode: CH52QJ website: n.a. contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	UK (Sandycroft)	participant	309˙312.00

Map

Project objective

The main objective of SALaDIn project is to prove industrial applicability of Picosun’s Atomic Layer Deposition (ALD) system, called P300F, for the needs of European semiconductor industry. This will be performed in collaboration with Silex Microsystems and Pegasus Chemicals who are responsible for testing and validation of the tool in industrial environment, and supply of chemical precursors for ALD thin films, respectively. The first target market is MEMS (Micro Electro Mechanical Systems) processing and production. The goal is to show that a single ALD system can fulfil the coating needs of MEMS foundry’s multiple devices by meeting film property and quality requirements, flexibility requirements for materials and processes as well as productivity requirements and cost targets for final devices. The system and processes optimized during the project will bring the ALD technology easily accessible and affordable for companies working with wafer sizes other than the mainstream 12” silicon technology and enable cost effective and high quality coatings in various application fields, such as MEMS, LEDs, sensors and devices made on compound semiconductors.

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The information about "SALADIN" are provided by the European Opendata Portal: CORDIS opendata.