# | ||||
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1 | SENATE Seven Nanometer Technology | 2015 | 177˙731˙624.00 | 31˙816˙386.00 |
2 | TAKE5 Technology Advances and Key Enablers for 5 nm | 2016 | 149˙882˙181.00 | 28˙364˙017.00 |
3 | TAKEMI5 Technology Advances and Key Enablers for Module Integration for 5 nm | 2017 | 132˙778˙302.00 | 28˙339˙999.00 |
4 | TAPES3 Technology Advances for Pilotline of Enhanced Semiconductors for 3nm | 2018 | 123˙445˙881.00 | 28˙196˙106.00 |
5 | PIN3S Pilot Integration of 3nm Semiconducter technology | 2019 | 119˙581˙291.00 | 26˙787˙918.00 |
The Institution ASML NETHERLANDS B.V. has been involved also in the following Horizon 2020 projects.