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TAPES3 SIGNED

Technology Advances for Pilotline of Enhanced Semiconductors for 3nm

Total Cost €

EC-Contrib. €

Partnership

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TAPES3 project word cloud

Explore the words cloud of the TAPES3 project. It provides you a very rough idea of what is the project "TAPES3" about.

challange node explored position line moore america industry materials solutions circuit 3d characterization 3nm lot affiliations conventional finfet employment alternative place newly continuation innovations patterning modules circuits masp imec hyper 10nm topology manufacturing scaling exports ju logic economy lithographic relates law worldwide euv discover pilot grand felt na companies 2013 benefit mask metrology technologies supporting centers exploring tools 2017 core 33 competition material create integration lithography semiconductor ecsel itrs touches outside asia tool tapes3 pacific scanners preferred sub sectors demonstrated single exposure

Project "TAPES3" data sheet

The following table provides information about the project.

Coordinator	ASML NETHERLANDS B.V. Organization address address: DE RUN 6501 city: VELDHOVEN postcode: 5504DR website: www.asml.com contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.
Coordinator Country	Netherlands [NL]
Total cost	123˙445˙881 €
EC max contribution	28˙196˙106 € (23%)
Programme	1. H2020-EU.2.1.1.7. (ECSEL)
Code Call	H2020-ECSEL-2017-1-IA-two-stage
Funding Scheme	ECSEL-IA
Starting year	2018
Duration (year-month-day)	from 2018-10-01 to 2021-09-30

Partnership

Take a look of project's partnership.

#	participants	country	role	EC contrib. [€]
1	ASML NETHERLANDS B.V. ASML NETHERLANDS B.V. Organization address address: DE RUN 6501 city: VELDHOVEN postcode: 5504DR website: www.asml.com contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	NL (VELDHOVEN)	coordinator	7˙501˙242.00
2	INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM Organization address address: KAPELDREEF 75 city: LEUVEN postcode: 3001 website: www.imec.be contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	BE (LEUVEN)	participant	6˙175˙448.00
3	CARL ZEISS SMT GMBH CARL ZEISS SMT GMBH Organization address address: RUDOLF EBER STRASSE 2 city: OBERKOCHEN postcode: 73447 website: n.a. contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	DE (OBERKOCHEN)	participant	4˙000˙000.00
4	APPLIED MATERIALS ISRAEL LTD APPLIED MATERIALS ISRAEL LTD Organization address address: OPPENHEIMER STREET 9 city: REHOVOT postcode: 76705 website: n.a. contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	IL (REHOVOT)	participant	1˙462˙650.00
5	LAM RESEARCH AG LAM RESEARCH AG Organization address address: SEZ-STRASSE 1 city: VILLACH postcode: 9500 website: n.a. contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	AT (VILLACH)	participant	1˙079˙510.00
6	NOVA MEASURING INSTRUMENTS LTD NOVA MEASURING INSTRUMENTS LTD Organization address address: WEIZMANN SCIENCE PARK BUILDING 22 city: REHOVOT postcode: 76100 website: www.nova.co.il contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	IL (REHOVOT)	participant	943˙250.00
7	VDL ETG TECHNOLOGY & DEVELOPMENT BV VDL ETG TECHNOLOGY & DEVELOPMENT BV Organization address address: SCHAKEL 22 city: EINDHOVEN postcode: 5651 GH website: n.a. contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	NL (EINDHOVEN)	participant	891˙603.00
8	INSTITUT FUER MIKROELEKTRONIK STUTTGART INSTITUT FUER MIKROELEKTRONIK STUTTGART Organization address address: ALLMANDRING STRASSE 30A city: STUTTGART postcode: 70569 website: n.a. contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	DE (STUTTGART)	participant	867˙464.00
9	FEI ELECTRON OPTICS BV FEI ELECTRON OPTICS BV Organization address address: ACHTSEWEG NOORD GEBOUW AAE 5 city: EINDHOVEN postcode: 5651 GG website: www.fei.com contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	NL (EINDHOVEN)	participant	820˙654.00
10	NEDERLANDSE ORGANISATIE VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO NEDERLANDSE ORGANISATIE VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO Organization address address: ANNA VAN BUERENPLEIN 1 city: DEN HAAG postcode: 2595 DA website: www.tno.nl contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	NL (DEN HAAG)	participant	761˙974.00
11	SILTRONIC AG SILTRONIC AG Organization address address: HANNS SEIDEL PLATZ 4 city: MUNCHEN postcode: 81737 website: www.siltronic.com contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	DE (MUNCHEN)	participant	515˙888.00
12	FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. Organization address address: HANSASTRASSE 27C city: MUNCHEN postcode: 80686 website: www.fraunhofer.de contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	DE (MUNCHEN)	participant	387˙050.00
13	COVENTOR SARL COVENTOR SARL Organization address address: AVENUE DU QUEBEC 3 city: VILLEBON SUR YVETTE postcode: 91140 website: www.coventor.com contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	FR (VILLEBON SUR YVETTE)	participant	358˙802.00
14	KLA-TENCOR CORPORATION (ISRAEL) KLA-TENCOR CORPORATION (ISRAEL) Organization address address: HATIKSHORET ST. city: MIGDAL HAEMEK postcode: 23100 website: n.a. contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	IL (MIGDAL HAEMEK)	participant	346˙185.00
15	DEMCON ADVANCED MECHATRONICS ENSCHEDE B.V. DEMCON ADVANCED MECHATRONICS ENSCHEDE B.V. Organization address address: INSTITUTENWEG 25 city: ENSCHEDE postcode: 7521 PH website: www.demcon.nl contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	NL (ENSCHEDE)	participant	344˙999.00
16	ION BEAM SERVICES ION BEAM SERVICES Organization address address: RUE GASTON IMBERT PROLONGEE city: ROUSSET postcode: 13790 website: www.ion-beam-services.com contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	FR (ROUSSET)	participant	274˙096.00
17	APPLIED MATERIALS BELGIUM APPLIED MATERIALS BELGIUM Organization address address: KAPELDREEF 75 Bus C1 city: LEUVEN postcode: 3001 website: n.a. contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	BE (LEUVEN)	participant	190˙167.00
18	PHYSIKALISCH-TECHNISCHE BUNDESANSTALT PHYSIKALISCH-TECHNISCHE BUNDESANSTALT Organization address address: Bundesallee 100 city: BRAUNSCHWEIG postcode: 38116 website: www.ptb.de contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	DE (BRAUNSCHWEIG)	participant	187˙395.00
19	SIEMENS INDUSTRY SOFTWARE NV SIEMENS INDUSTRY SOFTWARE NV Organization address address: INTERLEUVENLAAN 68 city: LEUVEN postcode: 3001 website: www.plm.automation.siemens.com contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	BE (LEUVEN)	participant	183˙675.00
20	RHEINISCH-WESTFAELISCHE TECHNISCHE HOCHSCHULE AACHEN RHEINISCH-WESTFAELISCHE TECHNISCHE HOCHSCHULE AACHEN Organization address address: TEMPLERGRABEN 55 city: AACHEN postcode: 52062 website: www.rwth-aachen.de contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	DE (AACHEN)	participant	169˙905.00
21	OPTIX FAB GMBH OPTIX FAB GMBH Organization address address: HANS KNOLL STR 6 city: JENA postcode: 7745 website: n.a. contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	DE (JENA)	participant	168˙437.00
22	SUSS MicroTec Photomask Equipment GmbH & Co. KG SUSS MicroTec Photomask Equipment GmbH & Co. KG Organization address address: Ferdinand-von-Steinbeis-Ring 10 city: Sternenfels postcode: 75447 website: n.a. contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	DE (Sternenfels)	participant	135˙867.00
23	PAUL SCHERRER INSTITUT PAUL SCHERRER INSTITUT Organization address address: FORSCHUNGSTRASSE 111 city: VILLIGEN PSI postcode: 5232 website: www.psi.ch contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	CH (VILLIGEN PSI)	participant	134˙952.00
24	RECIF TECHNOLOGIES RECIF TECHNOLOGIES Organization address address: rue des briquetiers 9 city: Blagnac postcode: 31700 website: www.reciftech.com contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	FR (Blagnac)	participant	92˙602.00
25	JSR MICRO NV JSR MICRO NV Organization address address: TECHNOLOGIELAAN 8 city: LEUVEN postcode: 3001 website: n.a. contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	BE (LEUVEN)	participant	92˙061.00
26	ADVANCED MASK TECHNOLOGY CENTER GMBH & CO KG ADVANCED MASK TECHNOLOGY CENTER GMBH & CO KG Organization address address: RAHNITZER ALLEE 9 city: DRESDEN postcode: 1109 website: www.amtc-dresden.com contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	DE (DRESDEN)	participant	80˙487.00
27	OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED Organization address address: TUBNEY WOODS city: ABINGDON postcode: OX13 5QX website: n.a. contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	UK (ABINGDON)	participant	29˙735.00
28	MENTOR GRAPHICS BELGIUM MENTOR GRAPHICS BELGIUM Organization address address: LIVOURNE 7, BOITE 4 city: BRUSSELS postcode: 1060 website: n.a. contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	BE (BRUSSELS)	participant	0.00

Map

Project objective

'In line with industry needs, Moore’s law, scaling in ITRS 2013, and ECSEL JU MASP 2017, the main objective of the TAPES3 project is to discover, develop and demonstrate lithographic, metrology, EUV mask technology, devices and process modules enabling 3nm node technology. This is planned with available EUV/NA 0.33 scanners, and with system design and integration of a new hyper NA EUV lithography tool to enable more single exposure patterning at 3nm to create complex integrated circuits. Process steps for 3D devices as alternative to the conventional FINFet will be explored for application in the 3nm node. The impact of the application of these so called 3D devices on circuit topology and logic design will be explored. During the development, specific challenges in metrology for the characterization of 3D devices will be assessed and metrology tools will be newly developed. The result will be demonstrated in the imec pilot line. The TAPES3 project relates to the ECSEL work program topic Equipment, Material and Manufacturing. It addresses and targets, as set out in MASP, the grand Challange of 'More Moore Equipment and Materials for sub 10nm technologies' by exploring the requirements and solutions for the 3nm node. The project touches the core of the continuation of Moore’s law. Moreover, the cost aware development process will support the involved companies, and will place them in a preferred position over their worldwide competition. Through their worldwide affiliations, the impact of the TAPES3 project will be felt outside Europe in America and Asia Pacific semiconductor centers and is expected to benefit the European economy a lot by supporting its semiconductor equipment and metrology sectors with innovations, exports and employment.'

Publications

List of publications.
year	authors and title	last update
2019	Bartosz Bilski, Heiko Feldmann, Paul GrÃ¤upner, Peter KÃ¼rz, Winfried Kaiser High-NA EUV Optics â€“the Key for Miniaturizationof Integrated Circuitsin the Next Decade published pages: , ISSN: , DOI:	2020-03-19
2019	Winfried Kaiser VLSI Keynote: EUVL - Optics: Status and Future Perspectives published pages: , ISSN: , DOI:	2020-03-19
2019	Sascha Migura Optics for EUV Lithography published pages: , ISSN: , DOI:	2020-03-19
2019	Heiko Feldmann, Paul GrÃ¤upner, Peter KÃ¼rz, Winfried Kaiser High-NA EUV Optics â€“ The key for miniaturizationof integrated circuits in the next decade published pages: , ISSN: , DOI:	2020-03-19

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