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METRO4-3D

Metrology for future 3D-technologies

Total Cost €

EC-Contrib. €

Partnership

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Outcomes and
results

METRO4-3D project word cloud

Explore the words cloud of the METRO4-3D project. It provides you a very rough idea of what is the project "METRO4-3D" about.

combining stacked separate kept lab probe covers ghz iontof probing profiling metrology industry voids additional hence validated stage micro line scanning stacking column area full position portfolio tool basic microscope themselves within certified reliability tofsims solutions applicability composition tepla efficiency tsv beol successful versus hall overcome resistance dies electrical technological sheet gain protocols established completely methodology complementary barriers relevance automated tools semiconductor linked 3d co innovation prior explored existence employ readiness action true metallization acoustic initial coo created feol partly commercialization die fib chain companies ict25 creates structures exploring leaders capres establishing food layer

Project "METRO4-3D" data sheet

The following table provides information about the project.

Coordinator	INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM Organization address address: KAPELDREEF 75 city: LEUVEN postcode: 3001 website: www.imec.be contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.
Coordinator Country	Belgium [BE]
Project website	http://www.metro4-3d.eu/
Total cost	3˙349˙813 €
EC max contribution	2˙689˙035 € (80%)
Programme	1. H2020-EU.2.1.1. (INDUSTRIAL LEADERSHIP - Leadership in enabling and industrial technologies - Information and Communication Technologies (ICT))
Code Call	H2020-ICT-2015
Funding Scheme	IA
Starting year	2016
Duration (year-month-day)	from 2016-02-01 to 2019-01-31

Partnership

Take a look of project's partnership.

#	participants	country	role	EC contrib. [€]
1	INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM Organization address address: KAPELDREEF 75 city: LEUVEN postcode: 3001 website: www.imec.be contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	BE (LEUVEN)	coordinator	1˙137˙903.00
2	CAPRES AS CAPRES AS Organization address address: DIPLOMVEJ 373 city: KGS. LYNGBY postcode: 2800 website: n.a. contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	DK (KGS. LYNGBY)	participant	301˙875.00
3	DANMARKS TEKNISKE UNIVERSITET DANMARKS TEKNISKE UNIVERSITET Organization address address: ANKER ENGELUNDSVEJ 1 BYGNING 101 A city: KGS LYNGBY postcode: 2800 website: www.dtu.dk contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	DK (KGS LYNGBY)	participant	300˙473.00
4	COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES Organization address address: RUE LEBLANC 25 city: PARIS 15 postcode: 75015 website: www.cea.fr contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	FR (PARIS 15)	participant	249˙221.00
5	FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. Organization address address: HANSASTRASSE 27C city: MUNCHEN postcode: 80686 website: www.fraunhofer.de contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	DE (MUNCHEN)	participant	246˙325.00
6	MATERIALS CENTER LEOBEN FORSCHUNG GMBH MATERIALS CENTER LEOBEN FORSCHUNG GMBH Organization address address: ROSEGGERSTRASSE 12 city: LEOBEN postcode: 8700 website: www.mcl.at contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	AT (LEOBEN)	participant	234˙136.00
7	ION-TOF TECHNOLOGIES GMBH ION-TOF TECHNOLOGIES GMBH Organization address address: HEISENBERGSTRASSE 15 city: MUNSTER postcode: 48149 website: www.iontof.com contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	DE (MUNSTER)	participant	117˙600.00
8	PVA TEPLA ANALYTICAL SYSTEMS GMBH PVA TEPLA ANALYTICAL SYSTEMS GMBH Organization address address: DEUTSCHORDENSTRASSE 38 city: WESTHAUSEN postcode: 73463 website: www.pva-analyticalsystems.com contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	DE (WESTHAUSEN)	participant	101˙500.00
9	EIDGENOSSISCHE MATERIALPRUFUNGS- UND FORSCHUNGSANSTALT EIDGENOSSISCHE MATERIALPRUFUNGS- UND FORSCHUNGSANSTALT Organization address address: UEBERLANDSTRASSE 129 city: DUBENDORF postcode: 8600 website: www.empa.ch contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	CH (DUBENDORF)	participant	0.00
10	LAM RESEARCH BELGIUM LAM RESEARCH BELGIUM Organization address address: KAPELDREEF 75 city: LEUVEN postcode: 3001 website: n.a. contact info title: n.a. name: n.a. surname: n.a. function: n.a. email: n.a. telephone: n.a. fax: n.a.	BE (LEUVEN)	participant	0.00

Map

Project objective

Within the food chain of equipment delivery for the semiconductor industry, Europe has kept a very strong position in the metrology area with many companies establishing themselves as main leaders in the field. Hence in line with the objectives of the ICT25 call for innovation action to overcome the (initial) barriers for the successful commercialization of novel European products, this project aims at exploring for a number of metrology solutions their technological readiness, reliability and relevance of the developed protocols, and the COO. The portfolio within the project covers new metrology concepts addressing specifically the processing challenges linked to 3D-Devices and range from probing basic layer properties (composition, electrical properties) in FEOL to control of metallization in BEOL up to issues linked to die stacking. Due to the specific processing steps which need to be addressed, three separate metrology tools will be assessed in this project i.e a Tofsims system (IonTOF) with build-in Scanning Probe stage and FIB column for true 3D-composition profiling, a completely automated micro-Hall and sheet resistance measurement tool (Capres) with additional capabilities for measurements on dedicated test structures (prior to full BEOL) and an GHz acoustic Microscope (Tepla) for probing voids in TSV’s and stacked dies. As some of them (IonTOf, Capres) are addressing partly complementary information (composition versus electrical properties), their co-existence in this project creates additional value as beyond the tool assessment also a methodology based on combining these concepts can be explored and certified. Moreover a significant efficiency gain is created as they can employ similar test structures and devices. For each of these tools, the basic metrology concepts are existing and validated in the lab on selected applications but their general applicability field within the semiconductor industry still needs to be established

Deliverables

List of deliverables.
Report on organized training on the instrument	Documents, reports	2019-10-03 10:47:52
Report 2 on dissemination activities	Documents, reports	2019-10-03 10:47:52
Summary of the access time on the instruments	Documents, reports	2019-10-03 10:47:52
Set-up of the website and strategic board	Websites, patent fillings, videos etc.	2019-10-03 10:47:52
Report documenting the detailed technical specifications of the individual components	Documents, reports	2019-10-03 10:47:52
Report on dissemination activities	Documents, reports	2019-10-03 10:47:52

Take a look to the deliverables list in detail: detailed list of METRO4-3D deliverables.

Publications

List of publications.
year	authors and title	journal	last update
2017	Eva GrÃ¼nwald, RenÃ© Hammer, JÃ¶rdis Rose, Bernhard Sartory, Roland Brunner Accretion Detection via Scanning Acoustic Microscopy in Microelectronic Components - Considering Symmetry Breaking Effects published pages: 1466-1467, ISSN: 1431-9276, DOI: 10.1017/S1431927617007991	Microscopy and Microanalysis 23/S1	2019-10-03

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The information about "METRO4-3D" are provided by the European Opendata Portal: CORDIS opendata.