DIAMEMS
Microelectromechanical Systems from Nanocrystalline Diamond
| Coordinatore | CARDIFF UNIVERSITY
Organization address
address: Newport Road 30-36 contact info |
| Nazionalità Coordinatore | United Kingdom [UK] |
| Totale costo | 270˙145 € |
| EC contributo | 270˙145 € |
| Programma | FP7-PEOPLE
Specific programme "People" implementing the Seventh Framework Programme of the European Community for research, technological development and demonstration activities (2007 to 2013) |
| Code Call | FP7-PEOPLE-2011-IEF |
| Funding Scheme | MC-IEF |
| Anno di inizio | 2012 |
| Periodo (anno-mese-giorno) | 2012-04-01 - 2014-03-31 |
Partecipanti
| # | ||||
|---|---|---|---|---|
| 1 |
CARDIFF UNIVERSITY
Organization address
address: Newport Road 30-36 contact info |
UK (CARDIFF) | coordinator | 270˙145.80 |
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Obiettivo del progetto (Objective)
'This project aims to develop high frequency, high quality factor micro and nano – electromechanical systems (MEMS) from nanocrystalline diamond (NCD). NCD offers superior performance to silicon for MEMS due to its extreme Young’s modulus, but it is also compatible with silicon CMOS technologies, offering a key advantage over other potential MEMS materials. High performance NCD growth and planarization will be optimised for MEMS applications. The realisation of continuous, smooth (<1nm rms over 1µm), pin hole free NCD over large areas exhibiting bulk diamond properties will enable a multitude of applications at drastically reduced cost to currently available bulk diamond technologies. The resulting material will have applications outside the MEMS field such as in tribology, optical coatings, electrochemical electrodes (when doped with boron), heat spreading etc. The development of clean room processing technologies of NCD will allow the fabrication of new devices and result in new ideas exploiting this novel material.'
Introduzione (Teaser)
Diamonds do not have to be large to be valuable, at least to scientists. Nanocrystalline diamond (NCD), superior to silicon for use in microelectromechanical systems (MEMS), was exploited in novel MEMS devices, attracting large industrial investment.