DIAMEMS

Microelectromechanical Systems from Nanocrystalline Diamond

Coordinatore	CARDIFF UNIVERSITY    more  Organization address address: Newport Road 30-36 city: CARDIFF postcode: CF24 ODE contact info Titolo: Ms. Nome: Eevi Cognome: Laukkanen Email: send email Telefono: +44 29 20870114
Nazionalità Coordinatore	United Kingdom [UK]
Totale costo	270˙145 €
EC contributo	270˙145 €
Programma	FP7-PEOPLE Specific programme "People" implementing the Seventh Framework Programme of the European Community for research, technological development and demonstration activities (2007 to 2013)
Code Call	FP7-PEOPLE-2011-IEF
Funding Scheme	MC-IEF
Anno di inizio	2012
Periodo (anno-mese-giorno)	2012-04-01   -   2014-03-31

 Partecipanti

#	participant	country	role	EC contrib. [€]
1	CARDIFF UNIVERSITY  Organization address address: Newport Road 30-36 city: CARDIFF postcode: CF24 ODE contact info Titolo: Ms. Nome: Eevi Cognome: Laukkanen Email: send email Telefono: +44 29 20870114	UK (CARDIFF)	coordinator	270˙145.80

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 Obiettivo del progetto (Objective)

'This project aims to develop high frequency, high quality factor micro and nano – electromechanical systems (MEMS) from nanocrystalline diamond (NCD). NCD offers superior performance to silicon for MEMS due to its extreme Young’s modulus, but it is also compatible with silicon CMOS technologies, offering a key advantage over other potential MEMS materials. High performance NCD growth and planarization will be optimised for MEMS applications. The realisation of continuous, smooth (<1nm rms over 1µm), pin hole free NCD over large areas exhibiting bulk diamond properties will enable a multitude of applications at drastically reduced cost to currently available bulk diamond technologies. The resulting material will have applications outside the MEMS field such as in tribology, optical coatings, electrochemical electrodes (when doped with boron), heat spreading etc. The development of clean room processing technologies of NCD will allow the fabrication of new devices and result in new ideas exploiting this novel material.'

Introduzione (Teaser)

Diamonds do not have to be large to be valuable, at least to scientists. Nanocrystalline diamond (NCD), superior to silicon for use in microelectromechanical systems (MEMS), was exploited in novel MEMS devices, attracting large industrial investment.