NanoBits

Exchangeable and Customizable Scanning Probe Tips

Coordinatore	OFFIS EV    more  Organization address address: Escherweg 2 city: OLDENBURG postcode: 26121 contact info Titolo: Dr. Nome: Albert Cognome: Sill Email: send email Telefono: +49 441 798 4297 Fax: +49 441 798 4267
Nazionalità Coordinatore	Germany [DE]
Totale costo	3˙239˙926 €
EC contributo	2˙499˙998 €
Programma	FP7-ICT Specific Programme "Cooperation": Information and communication technologies
Code Call	FP7-ICT-2009-5
Funding Scheme	CP
Anno di inizio	2010
Periodo (anno-mese-giorno)	2010-09-01   -   2013-08-31

 Partecipanti

#	participant	country	role	EC contrib. [€]
1	OFFIS EV  Organization address address: Escherweg 2 city: OLDENBURG postcode: 26121 contact info Titolo: Dr. Nome: Albert Cognome: Sill Email: send email Telefono: +49 441 798 4297 Fax: +49 441 798 4267	DE (OLDENBURG)	coordinator	0.00
2	DANMARKS TEKNISKE UNIVERSITET  Organization address address: Anker Engelundsvej 1, Building 101A city: KONGENS LYNGBY postcode: 2800 contact info Titolo: Prof. Nome: Peter Cognome: Boggild Email: send email Telefono: +45 4525 5723 Fax: +45 4588 7762	DK (KONGENS LYNGBY)	participant	0.00
3	EIDGENOESSISCHE MATERIALPRUEFUNGS- UND FORSCHUNGSANSTALT  Organization address address: Ueberlandstrasse city: DUEBENDORF postcode: 8600 contact info Titolo: Dr. Nome: Johann Cognome: Michler Email: send email Telefono: +41 33 2284605 Fax: +41 33 2284490	CH (DUEBENDORF)	participant	0.00
4	FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V  Organization address address: Hansastrasse city: MUENCHEN postcode: 80686 contact info Titolo: Mr. Nome: Maximilian Cognome: Steiert Email: send email Telefono: +49 89 1205 2721 Fax: +49 89 1205 7534	DE (MUENCHEN)	participant	0.00
5	JPK INSTRUMENTS AG  Organization address address: BOUCHESTRASSE city: BERLIN postcode: 12435 contact info Titolo: Mr. Nome: Jörn Cognome: Kamps Email: send email Telefono: +49 30 5331 12070 Fax: +49 30 5331 22555	DE (BERLIN)	participant	0.00
6	NANOWORLD SERVICES GMBH  Organization address address: SCHOTTKYSTRASSE city: ERLANGEN postcode: 91058 contact info Titolo: Mr. Nome: Thomas Cognome: Sulzbach Email: send email Telefono: +49 9131 761200 Fax: +49 9131 761260	DE (ERLANGEN)	participant	0.00

Mappa

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 Obiettivo del progetto (Objective)

The atomic force microscope (AFM) has become a standard and wide spread instrument for characterizingnanoscale devices and can be found in most of today's research and development areas. The NanoBitsproject provides exchangeable and customizable scanning probe tips that can be attached to standard AFMcantilevers offering an unprecedented freedom in adapting the shape and size of the tips to the surfacetopology of the specific application. NanoBits themselves are 2-4 μm long and 120-150 nm thin flakes ofheterogeneous materials fabricated in different approaches. These novel tips will allow for characterizing threedimensional high-aspect ratio and sidewall structures of critical dimensions such as nanooptical photoniccomponents and semiconductor architectures which is a bottle-neck in reaching more efficient manufacturingtechniques. It is thus an enabling approach for almost all future nanoscale applications.

A miniaturized robotic microsystem combining innovative nanosensors and actuators will be used to explorenew strategies of micro-nano-integration in order to realize a quick exchange of NanoBits. For the fabricationof the NanoBits, two different techniques are proposed. On the one hand, a standard silicon processingtechnique enables batch fabrication of various NanoBits designs defined by electron beam lithography. On theother hand, focused ion beam milling can be used to structure a blank of heterogeneous materials, the socallednembranes. Novel scanning modes in atomic force microscopy will be developed to take full advantageof the different NanoBits geometries and to realize AFM imaging of critical dimension structures. Theinnovative nanoimaging capabilities will be applied to characterize and develop novel nanooptical photonicstructures in the wavelength or even sub-wavelength range and TERS applications in the nanomaterial andbiomedical sector. Especially the involved SMEs will exploit and disseminate the results to potential users torealize a more efficient micro-and nanomanufacturing.