NANOHEAT
MultidomaiN plAtform for iNtegrated MOre-tHan-MoorE/Beyond CMOS systems charActerisation & diagnosTics
| Coordinatore | INSTYTUT TECHNOLOGII ELEKTRONOWEJ
Organization address
address: al. Lotnikow 32/46 contact info |
| Nazionalità Coordinatore | Poland [PL] |
| Totale costo | 5˙814˙277 € |
| EC contributo | 3˙995˙000 € |
| Programma | FP7-ICT
Specific Programme "Cooperation": Information and communication technologies |
| Code Call | FP7-ICT-2011-8 |
| Funding Scheme | CP |
| Anno di inizio | 2012 |
| Periodo (anno-mese-giorno) | 2012-10-01 - 2015-09-30 |
Partecipanti
| # | ||||
|---|---|---|---|---|
| 1 |
INSTYTUT TECHNOLOGII ELEKTRONOWEJ
Organization address
address: al. Lotnikow 32/46 contact info |
PL (WARSZAWA) | coordinator | 0.00 |
| 2 |
CARL ZEISS SMS GMBH
Organization address
address: CARL-ZEISS-PROMENADE 10 contact info |
DE (JENA) | participant | 0.00 |
| 3 |
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
Organization address
address: Rue Michel -Ange 3 contact info |
FR (PARIS) | participant | 0.00 |
| 4 |
ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE
Organization address
address: BATIMENT CE 3316 STATION 1 contact info |
CH (LAUSANNE) | participant | 0.00 |
| 5 |
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V
Organization address
address: HANSASTRASSE 27C contact info |
DE (MUNCHEN) | participant | 0.00 |
| 6 |
IBM RESEARCH GMBH
Organization address
address: SAEUMERSTRASSE 4 contact info |
CH (RUESCHLIKON) | participant | 0.00 |
| 7 |
IMINA TECHNOLOGIES SA
Organization address
address: CHEMIN DE LA RAYE 13 contact info |
CH (ECUBLENS) | participant | 0.00 |
| 8 |
POLITECHNIKA WROCLAWSKA
Organization address
address: WYBRZEZE WYSPIANSKIEGO 27 contact info |
PL (WROCLAW) | participant | 0.00 |
| 9 |
TECHNISCHE UNIVERSITAET ILMENAU
Organization address
address: EHRENBERGSTRASSE 29 contact info |
DE (ILMENAU) | participant | 0.00 |
| 10 |
UNIVERSITE DE FRANCHE-COMTE
Organization address
address: CLAUDE GOUDIMEL 1 contact info |
FR (BESANCON) | participant | 0.00 |
| 11 |
UNIVERSITE DE TECHNOLOGIE DE BELFORT MONTBELIARD
Organization address
address: SITE DE BELFORT, 2EME ETAGE contact info |
FR (BELFORT) | participant | 0.00 |
Mappa
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Obiettivo del progetto (Objective)
For advanced nano-devices or Beyond-CMOS structures (sub-40nm transistors, SETs, graphene structures etc.) there is a deep shortage of versatile, multidomain tools capable of analysing phenomena occurring at a nanoscale. The family of AFM-based techniques provides a various nanoscale observation capabilities restricted however to dedicated, particular phenomena. Moreover, available AFM systems do not allow for easy 'domain-mixing' as well as for combination of large distance and nanoscale positioning precision. These techniques are not useful as a in-line monitoring tools.The principle goal of the NANOHEAT project is to develop, deliver and validate a miniaturized and integrated platform which provides a multidimensional nanoprobing platform for advanced thermal analysis at the nanoscale. The multi-functional system of independently controlled AFM-based nanoprobes, equipped with dedicated (FIB functionalized) tips and actuators will allow for multi-domain diagnostics of nanoelectronic, nanophotonic and bio-electronic devices. The proposed system will allow to observe thermal, electrical (e.g. potential) or even chemical (e.g. electrochemical) properties at the nanoscale. It will also have in-line (on wafer) diagnostics capabilities.The consortium is composed of 3 R&D institutes, 4 university teams and 2 SMEs providing a mixture of a complementary expertise related to micro-engineering, design and technology of micro/nano-devices and systems, design and manufacturing of measurement and control electronics, modelling and simulation, material science and physics. Besides, four partners has an expertise and potential required for validation of the developed system for specific applications. The Coordinator, ITE is a leading Polish research centre active in the micro/nanoelectronic, micro/nano-system and photonic domains.
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