MINASYS-COE

Micro and Nano Systems Center of Excellence - IMEL/NCSR DEMOKRITOS

Coordinatore	"NATIONAL CENTER FOR SCIENTIFIC RESEARCH ""DEMOKRITOS"""    more  Organization address address: Patriarchou Gregoriou Str. city: AGHIA PARASKEVI postcode: 15310 contact info Titolo: Dr. Nome: Dimitris Cognome: Tsoukalas Email: send email Telefono: 0030 210 65 03 123 Fax: 0030 210 65 11 723
Nazionalità Coordinatore	Greece [EL]
Totale costo	3˙533˙562 €
EC contributo	2˙003˙085 €
Programma	FP7-REGPOT Specific Programme "Capacities": Research potential of Convergence Regions
Code Call	FP7-REGPOT-2009-1
Funding Scheme	CSA-SA
Anno di inizio	2009
Periodo (anno-mese-giorno)	2009-12-01   -   2013-07-31

 Partecipanti

#	participant	country	role	EC contrib. [€]
1	"NATIONAL CENTER FOR SCIENTIFIC RESEARCH ""DEMOKRITOS"""  Organization address address: Patriarchou Gregoriou Str. city: AGHIA PARASKEVI postcode: 15310 contact info Titolo: Dr. Nome: Dimitris Cognome: Tsoukalas Email: send email Telefono: 0030 210 65 03 123 Fax: 0030 210 65 11 723	EL (AGHIA PARASKEVI)	coordinator	2˙003˙085.50

Mappa

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 Obiettivo del progetto (Objective)

'The purpose of the present proposal is to extend and improve the existing facilities and know-how at the Institute of Microelectronics (IMEL) of the National Center for Scientific Research (NCSR) “Demokritos”, recognized as Center of Excellence in Nanoelectronics and MEMS in Greece, and organize and coordinate the access to the infrastructure at regional, national and EU levels. Dissemination and networking activities will be also organized, targeting mainly, but not exclusively, collaborations with the countries in Southeastern Europe in the field of nanofabrication, nanodevices and sensors/MEMS/NEMS. With the existing expertise, know-how and state-of-the-art infrastructure and facilities, complemented by important new equipment that will be purchased within the present proposal, MiNaSys Center of Excellence (MiNaSys-CoE) aims at becoming unique in the Southeastern Europe region. The instruments for the implementation of MiNaSys-CoE will be the following: • Extending and upgrading the existing infrastructure • Recruitment of experienced scientists and engineers • Development of the access to the existing facilities and know-how • Development of networking activities and strategic partnership with other leading research groups in Europe. • Organization of scientific events, thematic sessions and seminars supporting knowledge transfer and research policy development. • Dissemination of results and activities'

Introduzione (Teaser)

Micro-electro-mechanical systems (MEMS) combine miniaturised electronic with mechanical components in a single chip to eliminate the need for two different systems. A Centre of Excellence in Greece worked on advancing research capacity in this arena.

Descrizione progetto (Article)

The EU-funded initiative 'Micro and Nano Systems Center of Excellence - IMEL / NCSR Demokritos' (http://imel.demokritos.gr/projects/minasys/ (MINASYS-COE)) was hosted at the Institute of Microelectronics (IMEL) at the National Center of Scientific Research 'Demokritos' in Greece. IMEL is widely known for research carried out on practical applications for MEMS.

Made using micro- and nano-fabrication techniques, MEMS can be relatively simple structures having no moving components. However, they can also be extremely complex systems with multiple moving components under the control of integrated microelectronics.

Over the years, IMEL researchers have applied MEMS for sensing temperature, pressure, chemical species, magnetic fields, radiation and many more applications. Remarkably, many of these micro-machined sensors have demonstrated performances exceeding those of their macro-scale counterparts.

With such a wide range of applications, IMEL endeavoured to strengthen its research and development capabilities by upgrading its infrastructure. Specifically, equipment was purchased for nano-scale patterning. The new electron-beam writing system can draw patterns down to 2.2 nanometre resolution.

The funding received also allowed IMEL to recruit experienced scientists and engineers. Furthermore, staff exchange with established Centres of Excellence in Europe helped the IMEL researchers get familiar with new sophisticated micro- and nano-fabrication techniques.

Workshops organised during the course of the MINASYS-COE project enhanced the visibility of IMEL in the international scientific community. Representatives of selected small and medium-sized enterprises (SMEs) as well as large industrial laboratories were invited to help pave the way towards a competitive nanotechnology laboratory.

Substantial improvements in IMEL's research capacity enabled better research collaboration with partner institutions at regional, national and European level. MINASYS-COE activities should ultimately promote MEMS research in the European Research Area and particularly in South-eastern Europe.