ATEMOX
Advanced TEchnology MOdelling for eXtra-functionality devices
| Coordinatore | FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V
Organization address
address: Hansastrasse 27C contact info |
| Nazionalità Coordinatore | Germany [DE] |
| Totale costo | 4˙330˙254 € |
| EC contributo | 3˙024˙035 € |
| Programma | FP7-ICT
Specific Programme "Cooperation": Information and communication technologies |
| Code Call | FP7-ICT-2009-5 |
| Funding Scheme | CP |
| Anno di inizio | 2010 |
| Periodo (anno-mese-giorno) | 2010-07-01 - 2013-11-30 |
Partecipanti
| # | ||||
|---|---|---|---|---|
| 1 |
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V
Organization address
address: Hansastrasse 27C contact info |
DE (MUENCHEN) | coordinator | 0.00 |
| 2 |
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
Organization address
address: RUE MICHEL -ANGE contact info |
FR (PARIS) | participant | 0.00 |
| 3 |
CONSIGLIO NAZIONALE DELLE RICERCHE
Organization address
address: PIAZZALE ALDO MORO contact info |
IT (ROMA) | participant | 0.00 |
| 4 |
EIDGENOESSISCHE TECHNISCHE HOCHSCHULE ZURICH
Organization address
address: Raemistrasse contact info |
CH (ZUERICH) | participant | 0.00 |
| 5 |
Excico France
Organization address
city: Gennevilliers contact info |
FR (Gennevilliers) | participant | 0.00 |
| 6 |
ION BEAM SERVICES
Organization address
address: RUE GASTON IMBERT PROLONGEE contact info |
FR (ROUSSET) | participant | 0.00 |
| 7 |
PROBION ANALYSIS SARL
Organization address
address: RUE DE FONTENAY contact info |
FR (BAGNEUX) | participant | 0.00 |
| 8 |
SEMILAB FELVEZETO FIZIKAI LABORATORIUM RESZVENYTARSASAG
Organization address
address: PRIELLE KORNELIA UTCA contact info |
HU (BUDAPEST) | participant | 0.00 |
| 9 |
STMICROELECTRONICS CROLLES 2 SAS
Organization address
address: RUE JEAN MONNET 850 contact info |
FR (CROLLES) | participant | 0.00 |
| 10 |
STMICROELECTRONICS S.A.
Organization address
address: Boulevard Romain Rolland 29 contact info |
FR (MONTROUGE) | participant | 0.00 |
| 11 |
SYNOPSYS GMBH
Organization address
address: KARL HAMMERSCHMIDT STR contact info |
DE (ASCHHEIM) | participant | 0.00 |
| 12 |
SYNOPSYS SWITZERLAND LLC
Organization address
address: Thurgauerstrasse contact info |
CH (ZURICH) | participant | 0.00 |
| 13 |
UNIVERSITE TOULOUSE III - Paul Sabatier
Organization address
address: ROUTE DE NARBONNE contact info |
FR (TOULOUSE) | participant | 0.00 |
| 14 |
UNIVERSITY OF NEWCASTLE UPON TYNE
Organization address
address: Kensington Terrace contact info |
UK (NEWCASTLE UPON TYNE) | participant | 0.00 |
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Obiettivo del progetto (Objective)
Within previous European projects with major contributions by the current proposers, process simulation has been brought to a state which allows in industrial environments a sufficiently accurate simulation of doping profiles in advanced CMOS technologies. Important electrical characteristics of core CMOS devices can now be predicted from scratch or with a minimum calibration effort. However, concepts towards low-power electronics, smart power applications, CMOS image sensors, and CMOS derivatives providing extra functionalities are still not sufficiently supported by TCAD. This concerns especially the prediction of leakage currents in such or parasitic devices caused by electrically active defects that remain after processing, and alternative doping techniques like plasma immersion ion implantation, low-temperature implantation, diversified cocktail implants and laser annealing which are considered for low-leakage ultra shallow junctions. The lack of suitable models that can be used in the early stages of industrial R&D inhibits the necessary cost reduction in the development of devices for which Europe is still at the forefront. Our project will develop the full set of missing models and implement and include them into the Sentaurus TCAD platform of Synopsys so that they are of immediate value to the European semiconductor industry. The integrated models will finally be evaluated by STMicroelectronics with respect to industrial needs. To reach these ambitious goals, a consortium of European companies active in complementary fields of competence (STMicroelectronics: device manufacturing, Synopsys: TCAD software, Exico, IBS: equipment production, Probion, Semilab: characterization) and leading European research institutes (CNR-IMM, CNRS-LAAS/CEMES, ETH-Zurich, Fraunhofer-IISB, Univ. Newcastle) has been formed which, together, is well prepared to expertly cover all fields from experiment via characterization and modelling to simulation.