METROSURF

Dimensional micro and nanometrology using areal topography data produced by 3D surface metrology instruments

Coordinatore	THE UNIVERSITY OF NOTTINGHAM    more  Organization address address: University Park city: NOTTINGHAM postcode: NG7 2RD contact info Titolo: Mr. Nome: Paul Cognome: Cartledge Email: send email Telefono: +44 115 846 6047
Nazionalità Coordinatore	United Kingdom [UK]
Totale costo	309˙235 €
EC contributo	309˙235 €
Programma	FP7-PEOPLE Specific programme "People" implementing the Seventh Framework Programme of the European Community for research, technological development and demonstration activities (2007 to 2013)
Code Call	FP7-PEOPLE-2013-IEF
Funding Scheme	MC-IEF
Anno di inizio	2015
Periodo (anno-mese-giorno)	2015-02-09   -   2017-02-08

 Partecipanti

#	participant	country	role	EC contrib. [€]
1	THE UNIVERSITY OF NOTTINGHAM  Organization address address: University Park city: NOTTINGHAM postcode: NG7 2RD contact info Titolo: Mr. Nome: Paul Cognome: Cartledge Email: send email Telefono: +44 115 846 6047	UK (NOTTINGHAM)	coordinator	309˙235.20
2	NPL MANAGEMENT LIMITED  Organization address address: SERCO HOUSE 16 BARTLEY WOOD - BUSINESS PARK BARTLEY WAY 16 city: HOOK - HAMPSHIRE postcode: RG27 9UY contact info Titolo: Ms. Nome: Tallulah Cognome: Sutherland-Spedding Email: send email Telefono: +44 208 943 6451	UK (HOOK - HAMPSHIRE)	participant	0.00

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 Obiettivo del progetto (Objective)

'The project investigates the development of original methods and algorithms for the dimensional and geometric verification of products and/or surface features defined at micro and nanometric scales. The idea is to overcome the current limitations of SEM imaging (only qualitative information) and micro/nano CMMs (slow, difficult to use) through an unconventional use of measurement data produced by advanced 3D profilometers and microscopes, which are being currently adopted in surface metrology for areal surface texture assessment. The ultimate goal is to produce a traceable, or at least reproducible measurement solution that can be used for quality inspection of micro/nano fabricated parts and devices, and/or for accurate measurement of defects and other singularities in precision engineering applications. Such a solution would finally provide a reliable and quantitative feedback to those research and industrial applications concerned with precision engineering, and/or seeking to improve the design and manufacturing processes typically adopted at the micro and sub-micrometric scales. Through the fellowship, the applicant will be able to join one of the most prolific and internationally renown research groups in surface metrology, and will be able to combine his previous experiences on algorithmic data processing for surface metrology with cutting-edge knowledge on the mode of operation and metrological performance of the most advanced surface metrology instruments currently available. Original solutions for dimensional micro and nanometrology will be devised by investigating a wide array of test cases of academic and industrial relevance pertaining MEMS, microfluidic devices, micro-textured surfaces and many other types of engineered high-precision surfaces. In addition to providing measurement solutions of wide applicability, the fellowship will give the applicant an invaluable opportunity to progress towards maturity and full scientific independence.'