PIEZOVOLUME
High volume piezoelectric thin film production process for microsystems
| Coordinatore | STIFTELSEN SINTEF
Organization address
address: Strindveien 4 contact info |
| Nazionalità Coordinatore | Norway [NO] |
| Sito del progetto | http://www.piezovolume.com |
| Totale costo | 5˙140˙345 € |
| EC contributo | 3˙750˙000 € |
| Programma | FP7-NMP
Specific Programme "Cooperation": Nanosciences, Nanotechnologies, Materials and new Production Technologies |
| Code Call | FP7-NMP-2008-SME-2 |
| Funding Scheme | CP-TP |
| Anno di inizio | 2010 |
| Periodo (anno-mese-giorno) | 2010-01-01 - 2012-12-31 |
Partecipanti
| # | ||||
|---|---|---|---|---|
| 1 |
STIFTELSEN SINTEF
Organization address
address: Strindveien 4 contact info |
NO (TRONDHEIM) | coordinator | 1˙007˙264.00 |
| 2 |
solar-semi GmbH
Organization address
address: MANFRED VON ARDENNE RING 20 contact info |
DE (Dresden) | participant | 541˙875.00 |
| 3 |
aixACCT Systems GmbH
Organization address
address: Talbotstr. 25 contact info |
DE (AACHEN) | participant | 426˙565.20 |
| 4 |
COVENTOR SARL
Organization address
city: VILLEBON SUR YVETTE contact info |
FR (VILLEBON SUR YVETTE) | participant | 339˙466.50 |
| 5 |
ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE
Organization address
address: BATIMENT CE 3316 STATION 1 contact info |
CH (LAUSANNE) | participant | 333˙063.60 |
| 6 |
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V
Organization address
address: Hansastrasse 27C contact info |
DE (MUENCHEN) | participant | 305˙141.25 |
| 7 |
OC OERLIKON BALZERS AG
Organization address
address: IRAMALI 18 contact info |
LI (BALZERS) | participant | 290˙952.50 |
| 8 |
SONITOR TECHNOLOGIES AS
Organization address
address: FORSKNINGSVEIEN 1B contact info |
NO (OSLO) | participant | 236˙876.40 |
| 9 |
VERMON SA
Organization address
address: RUE DU GENERAL RENAULT 180 contact info |
FR (TOURS CEDEX 1) | participant | 183˙615.75 |
| 10 |
OCE TECHNOLOGIES B.V.
Organization address
address: SINT URBANUSWEG 43 contact info |
NL (VENLO) | participant | 85˙179.80 |
Mappa
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Obiettivo del progetto (Objective)
'This proposal will address high volume production of MEMS (Micro-Electro Mechanical Systems) with a piezoelectric thin film as active element (piezoMEMS). This technology can fulfil many of the requirements of sensors and actuators in tomorrow’s smart systems, as a result of the large displacements, high sensing functionality and high energy densities that can be obtained, compared to pure Si-MEMS. As a consequence, they are very attractive for industries like automotive, aerospace, medical, telecom and consumer electronics. Large European companies tend to buy devices like sensors for their products, rather than to develop processes and devices themselves. European SMEs are natural providers of such devices. However, since there are no automated facilities in Europe for volume production of piezoelectric microsystems, they are not able to commercialize piezoMEMS products. A combined effort by European research institutes, industry and SMEs can close this gap. The main vision of piezoVolume is to provide the means for high throughput, cost-effective and robust manufacturing of piezoelectric microsystems in Europe, where SMEs are both device developers and production technology providers. A set of procedures, guidelines and fabrication tools will be developed, enabling short time to market for new device concepts. piezoVolume will combine three leading research groups in Europe, which are already acting worldwide in the piezoMEMS scientific community, with highly relevant and skilled technological partners, to build a consortium that is able to develop a full production line for piezoMEMS in Europe for the first time. Readily available cost-effective wafer based batch processing of piezoMEMS will lower the threshold for industry acceptance and be the enabling technology to realise new products based on piezoMEMS.'