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SENSiSOFT SIGNED

New sensor devices based on soft chemistry assisted nanostructured functional oxides on Si integrated systems

Total Cost €

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EC-Contrib. €

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Partnership

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 SENSiSOFT project word cloud

Explore the words cloud of the SENSiSOFT project. It provides you a very rough idea of what is the project "SENSiSOFT" about.

solution    quartz    everyday    1d    motion    monitoring    sensitive    sensisoft    mass    times    abundant    bridges    size    structure    jet    2d    perovskite    ing    wireless    lamb    porous    plates    active    morphologies    demand    epitaxial    oxide    nanostructures    milestone    answer    films    piezoelectric    resonators    fullest    sensor    network    sensors    innovative    nanowires    mems    sustainable    demands    generators    threshold    detection    monolithic    wave    chemical    nanorods    techniques    structures    soft    strategies    harmless    piezoelectrics    substrate    bridging    unified    limit    ultrasound    nanostructuration    wns    combined    configuration    industry    cheap    pressure    excellent    representing    microfabrication    exploited    avoiding    layers    silicon    gap    billion    saw    ink    metrology    thin    mechanical    unusual    node    resonating    oxides    sensitivity    micromachining    integration    hollandites    materials    direct    fabrication    integrating    forces    hollandite    membranes    nanometer    multisensor    printers    date    chemistry    clamping    nanostructured    mainly    proposes    resonator   

Project "SENSiSOFT" data sheet

The following table provides information about the project.

Coordinator
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE CNRS 

Organization address
address: RUE MICHEL ANGE 3
city: PARIS
postcode: 75794
website: www.cnrs.fr

contact info
title: n.a.
name: n.a.
surname: n.a.
function: n.a.
email: n.a.
telephone: n.a.
fax: n.a.

 Coordinator Country France [FR]
 Total cost 1˙499˙360 €
 EC max contribution 1˙499˙360 € (100%)
 Programme 1. H2020-EU.1.1. (EXCELLENT SCIENCE - European Research Council (ERC))
 Code Call ERC-2018-STG
 Funding Scheme ERC-STG
 Starting year 2019
 Duration (year-month-day) from 2019-01-01   to  2023-12-31

 Partnership

Take a look of project's partnership.

# participants  country  role  EC contrib. [€] 
1    CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE CNRS FR (PARIS) coordinator 1˙499˙360.00

Map

 Project objective

Piezoelectrics are the active elements of many everyday applications, from ink-jet printers to ultrasound generators, representing a billion euro industry. They are the key elements of motion sensors and resonators present in any wireless network sensor (WNS) node. However, an increased production of piezoelectrics in a sustainable way is to-date a milestone. SENSiSOFT proposes to come up with materials that can provide a solution to this problem: piezoelectric materials that are abundant, cheap and harmless. The aim of this project is to produce new piezoelectric devices of nanometer size with an unusual limit for wireless mechanical sensors, using direct and combined chemical integration of quartz, perovskite and hollandites materials as nanostructured epitaxial thin films on silicon. This is a major challenge that demands bridging the gap between soft-chemistry and microfabrication techniques. Three strategies are proposed for this goal: i) Implement a soft chemistry unified, monolithic process that will allow integrating epitaxial quartz, hollandite and perovskite oxide thin layers on silicon substrate with high piezoelectric response. ii) Nanostructuration of piezoelectric epitaxial oxide thin films into controllable morphologies or nanostructures, in particular porous structure and 1D nanowires or nanorods, allowing excellent properties of oxides to be exploited to the fullest, mainly by avoiding clamping and improving its sensitivity. iii) Fabrication of nanostructured SAW resonator-based and a LAMB-WAVE multisensor for monitoring mechanical parameters (mass, forces, pressure…). We will use MEMs technology in order to be able to define resonating structures (plates, membranes, bridges…) by silicon micromachining. So, SENSiSOFT presents three innovative strategies to develop sensor devices capable to answer the metrology demand, with a detection threshold 10 to 100 times more sensitive resulting from a 1D and 2D configuration of novel piezoelectric oxides.

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The information about "SENSISOFT" are provided by the European Opendata Portal: CORDIS opendata.

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