MINIGAS
Miniaturised photoacoustic gas sensor based on patented interferometric readout and novel photonic integration technologies
| Coordinatore | TEKNOLOGIAN TUTKIMUSKESKUS VTT
Organization address
city: Oulu contact info |
| Nazionalità Coordinatore | Finland [FI] |
| Totale costo | 2˙549˙342 € |
| EC contributo | 1˙850˙000 € |
| Programma | FP7-ICT
Specific Programme "Cooperation": Information and communication technologies |
| Code Call | FP7-ICT-2007-2 |
| Funding Scheme | CP |
| Anno di inizio | 2008 |
| Periodo (anno-mese-giorno) | 2008-04-01 - 2012-09-30 |
Partecipanti
| # | ||||
|---|---|---|---|---|
| 1 |
TEKNOLOGIAN TUTKIMUSKESKUS VTT
Organization address
city: Oulu contact info |
FI (Oulu) | coordinator | 0.00 |
| 2 |
DOBLE TRANSINOR AS
Organization address
address: SORGENFRIVEIEN 9 contact info |
NO (TRONDHEIM) | participant | 0.00 |
| 3 |
DRAGERWERK AG & CO KGAA
Organization address
address: MOISLINGER ALLEE contact info |
DE (LUBECK) | participant | 0.00 |
| 4 |
GASERA OY
Organization address
address: TYKISTOKATU contact info |
FI (TURKU) | participant | 0.00 |
| 5 |
IOFFE PHYSICO-TECHNICAL INSTITUTE OF THE RUSSIAN ACADEMY OF SCIENCES
Organization address
address: 26 Polytekhnicheskaya contact info |
RU (ST PETERSBURG) | participant | 0.00 |
| 6 |
SELEX SISTEMI INTEGRATI SPA
Organization address
address: VIA TIBURTINA contact info |
IT (ROMA) | participant | 0.00 |
| 7 |
TURUN YLIOPISTO
Organization address
address: YLIOPISTONMAKI contact info |
FI (TURKU) | participant | 0.00 |
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Obiettivo del progetto (Objective)
High-sensitivity gas sensors measure the presence of trace gases. They have a wide range of applications. Finnish SME Gasera has recently developed a MEMS-based mechanism for detecting the pressure waves created in photo-acoustic cells. This innovation can be used to realize infrared gas sensors of extreme sensitivity. Instead of the usual microphone (membrane with capacitive readout) the Gasera cell contains a 'free-standing' silicon cantilever. The mechanical movement of the free end of the cantilever is 100x larger than the centre of a fixed membrane. Furthermore, the movement of the cantilever is detected interferometrically not capacitively. The resulting improvement in sensitivity by these innovations is about three orders of magnitude over the prior art. Three international patent applications are pending. Whereas other optical gas detection methods can not be miniaturized because of the long optical pathlengths needed for high sensitivity, theoretical analyses predict that the cantilever PA cell can be miniaturized. The goal is to build and demonstrate a miniaturised sensor sub-system that achieves two or three orders of magnitude better sensitivity (on sub-ppm level!) than other optical measurement methods could achieve at similar package volume. A much lower cost and wider temperature range of operation are also predicted.nnKeywordsnphoto-acoustic, gas detection; high sensitivity; cantilever interferometric readout