SMARTIEHS

Smart inspection system for high speed and multifunctional testing of MEMS and MOEMS

Coordinatore	STIFTELSEN SINTEF    more  Organization address address: Forskningsveien, PO Box 124 Blindern 1 city: Oslo postcode: 314 contact info Titolo: Mr. Nome: Geir Cognome: Horn Email: send email Telefono: 4793059335 Fax: 4793176871
Nazionalità Coordinatore	Norway [NO]
Totale costo	3˙783˙986 €
EC contributo	2˙850˙000 €
Programma	FP7-ICT Specific Programme "Cooperation": Information and communication technologies
Code Call	FP7-ICT-2007-2
Funding Scheme	CP
Anno di inizio	2008
Periodo (anno-mese-giorno)	2008-04-01   -   2011-09-30

 Partecipanti

#	participant	country	role	EC contrib. [€]
1	STIFTELSEN SINTEF  Organization address address: Forskningsveien, PO Box 124 Blindern 1 city: Oslo postcode: 314 contact info Titolo: Mr. Nome: Geir Cognome: Horn Email: send email Telefono: 4793059335 Fax: 4793176871	NO (Oslo)	coordinator	0.00
2	CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE  Organization address address: Rue Michel -Ange city: PARIS postcode: 75794 contact info Titolo: Ms. Nome: Anne Florence Cognome: REMY Email: send email Telefono: +33 383856042 Fax: +33 383324592	FR (PARIS)	participant	0.00
3	CSEM CENTRE SUISSE D'ELECTRONIQUE ET DE MICROTECHNIQUE SA - RECHERCHE ET DEVELOPPEMENT  Organization address address: Rue Jaquet-Droz city: NEUCHATEL postcode: 2002 contact info Titolo: Mr. Nome: Thomas Cognome: BAECHLER Email: send email Telefono: +41 44 497 14 2 Fax: +41 44 497 1400	CH (NEUCHATEL)	participant	0.00
4	ECOLE NATIONALE SUPERIEURE DE MECANIQUE ET DES MICROTECHNIQUES  Organization address address: CHEMIN DE L EPITAPHE city: BESANCON CEDEX postcode: 25030 contact info Titolo: Ms. Nome: Marie-France Cognome: BURTHERET Email: send email Telefono: 33381402710 Fax: 33381402713	FR (BESANCON CEDEX)	participant	0.00
5	FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V  Organization address address: Hansastrasse city: MUENCHEN postcode: 80686 contact info Titolo: Mr. Nome: Maximilian Cognome: Steiert Email: send email Telefono: +49 8912052721 Fax: +49 8912057534	DE (MUENCHEN)	participant	0.00
6	HELIOTIS AG  Organization address address: BADENERSTRASSE 569 city: ZUERICH postcode: 8048 contact info Titolo: Dr. Nome: Rudolf Josef Cognome: Moosburger Email: send email Telefono: +41 41 4552222 Fax: +41 41 4552221	CH (ZUERICH)	participant	0.00
7	IMMS INSTITUT FUER MIKROELEKTRONIK- UND MECHATRONIK-SYSTEME GMBH  Organization address address: EHRENBERGSTRASSE 27 city: ILMENAU postcode: 98693 contact info Titolo: Mr. Nome: Mario Cognome: Goerlach Email: send email Telefono: +49 3677 695507 Fax: +49 3677 695515	DE (ILMENAU)	participant	0.00
8	POLITECHNIKA WARSZAWSKA  Organization address address: PLAC POLITECHNIKI city: WARSZAWA postcode: 00-661 contact info Titolo: Ms. Nome: Halina Cognome: Jozwicka Email: send email Telefono: 48222348308 Fax: 48222348601	PL (WARSZAWA)	participant	0.00
9	UNIVERSITE DE FRANCHE-COMTE  Organization address address: CLAUDE GOUDIMEL 1 city: BESANCON postcode: 25030 contact info Titolo: Ms. Nome: Pauline Cognome: Fournier Email: send email Telefono: +33 3 81 66 58 14 Fax: +33 3 81 50 11 03	FR (BESANCON)	participant	0.00

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 Obiettivo del progetto (Objective)

SMARTIEHS develops a smart, high-speed, cost effective and flexible inspection system for production of Micro(Opto)ElectroMechanicalSystems (M(O)EMS). SMARTIEHS decreases the inspection time of a wafer by a factor of 100. It cuts production costs and shorten the time to market.nTo achieve this, SMARTIEHS develops an innovative measurement concept: a probing wafer consisting of an array of micro optical sensors is adapted to and aligned with the wafer under test. The design and production of the micro-optical interferometer array inspects 100 M(O)EMS structures within only one measurement cycle. A multifunctional approach of the measurement concept allows the inspection of passive and active parameters within one inspection system. A novel smart pixel detector array is developed.nSMARTIEHS provides a multifunctional design with two interferometer configurations; a low coherent interferometer and a laser interferometer. The project focuses on the measurement of shape and deformation, resonance frequency and vibration amplitude distribution.nThe SMARTIEHS technology will be validated and demonstrated with industrial end users.nThe work in SMARTIEHS will be organised in eight work packages: Project management, Inspection system design, Micro-optical interferometer system design, Micro-optical wafer production, Smart pixel camera development, inspection system integration, Inspection system test and validation, Exploitation and dissemination.nThe SMARTIEHS consortium has RTD partners and industrial users: SINTEF (low-coherence interferometry, micro optics), WUT (laser interferometry, micro optics), Fraunhofer (production of Diffractive Optical Elements), CNRS (production of refractive optics, micro lenses), CSEM (design and production of smart pixel detector arrays), Heliotis (exploitation), IMMS (macro design of the inspection system), and Techfab (end user and validation).nSMARTIEHS lasts 38 months and has a budget of 3,77M�. Requested EC contribution is 2,85 M�