FIBLYS

Multi-functional Analytical Focussed ion beam tool for nanotechnology

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 Obiettivo del progetto (Objective)

'The project FIBLYS aims at developing an innovative nanostructuring, nanomanipulation and nanoanalysis instrument: a hybrid scanning probe (SPM) and dual beam focussed ion beam (FIB) instrument (including scanning electron microscopy (SEM) capabilities). In addition to an instrument based on conventional dual beam FIB(SEM) technology, an SPM/FIB(SEM) microscope will use both techniques, integrated in a compact setup offering capabilities that not only combine the techniques but allow for nanoanalysis and nanostructuring/-manipulation options that the single instrument or sequential use of the techniques is unable to achieve. This FIBLYS hybrid device will allow to use all FIB capabilities while imaging the procedures with the integrated SEM. The SEM has the options of chemical analysis through Energy Dispersive X-ray analysis (EDX) and structural analysis through Electron Backscatter diffraction (EBSD). The combination of SEM and SPM provides for the combination of nano-scale chemistry and crystallography imaging via electron-matter interactions (EDX, EBSD) with the information from tip-sample interactions like topography or magnetic/electrostatic force imaging. Combining electron-matter and tip-sample interactions, the FIBLYS hybrid instrument will for the first time allow to probe with nano-scale resolution many electron-matter interactions like detection of electron beam induced current (EBIC), or cathodoluminescence or phonons, or backscattered electrons directly at the surface with cantilever based sensors. This project will merge FIB(SEM) and SPM manufacturers at European level and reinforce their competitiveness. The partnership reflects the excellence and competences needed in this project, only possible through transnational co-operative research of six SMEs (SPM and FI(SEM) manufacturers, specialists in SPM and SEM control, expertise in electron/ion optics, cantilever manufacturers for SPM techniques as well as three RTD performers.'

Introduzione (Teaser)

Scientists developed a multifunctional tool capable of simultaneously visualising, analysing and manipulating materials the size of molecules. The tool will be indispensable in developing miniature devices.

Descrizione progetto (Article)

Nanotechnology can be thought of as the engineering of functional systems the size of atoms and molecules. In order for the field to progress, scientists must be able to see, manipulate and control nanomaterials.

Scanning electron microscopes (SEMs), which use a beam of electrons to illuminate an object have been around for many years. The technology enables scientists to see objects at the nano scale not visible with light microscopes. They offer high resolution with large depth of focus and the possibility for microanalysis.

Recently, focused ion beam (FIB) microscopes with both imaging and micromachining capabilities at the nanometre scale have become commercially available. FIB instruments are similar to SEMs except that they use an ion beam (a beam of charged particles generally produced by removing electrons from neutral atoms) rather than an electron beam.

Their use has opened the door to fundamental materials studies and technological applications not previously possible. They are often integrated with SEM columns to produce a versatile dual-beam FIB (SEM) platform.

European scientists took the technology one step further by integrating a dual-beam FIB (SEM) instrument with a hybrid scanning probe microscope (SPM). FIB technology enables micro-structuring and surface modification on the nano scale. The SEM provides options for both chemical and structural analysis. SEM together with SPM facilitates nano-scale chemistry and crystallography imaging.

EU funding of the 'Multifunctional analytical focused ion beam tool for nanotechnology' (Fiblys) project enabled investigators to develop a truly unique nano-structuring, nanomanipulation and nanoanalysis instrument. The final Fiblys prototype with complementary use of SEM, FIB, SPM and several analytical techniques thus enables nanotechnological capabilities not previously available with any instrument. Innovations made possible with Fiblys technology should facilitate the development of entirely new products and processes related to nanotechnology.

The Fiblys system is certain to become indispensable for research and industrial nanotechnology applications in a variety of fields including biotechnology, optoelectronics and sensors.